The POU3500 process delivers dynamic temperature Charge of the process chamber cathode / electrode / anode and will be synchronized with any etch procedure.
thirty% of its peak power use, supplying our customers significant reduction in running fees and improved reliability.
The information under is classified by semiconductor process and Instrument manufacturer. Every desk contains an purposes Matrix that reveals qulified and industrial processes.
Originally founded in 1985, our company has developed right into a recognized chief in supplying temperature control techniques to the worldwide semiconductor industry.
LAUDA-Noah will, for just a shopper's retrofit analysis, observe and alter its fluid temperature Manage profiles to match an existing TCUs' so as to ensure a sleek system integration by means of DAQ.
The accuracy with the POU 3300 permits impartial control of the process fluid temperature towards the wafer chuck inside of +/- 0.one °C of established level, plus the quickly response time of the system lets for maximum wafer-to-wafer repeatability through the etch course of action.
All static TCUs involve excessive cooling & heating capacities because of their really massive course of action fluid reservoirs. The process fuid reservoir on LAUDA-Noah's dynamic temperature Manage process is less than 1 gallon.
With our device strategically mounted approximately 6 feet within the chamber, we achieve a much more correct reading from the chuck temperature. This method ensures constant temperature all over the manufacturing whole lot, bringing about improved wafer-to-wafer CD uniformity.
Large Footprint: Static models occupy major space in the fabrication Software place, reducing its performance.
LAUDA-Noah is meeting these new challenges and has integrated energy conserving engineering in devices which are welcoming on the setting and possess a inexpensive to work.
The TEs' can change directly from heating to cooling, or visa-versa. They can switch on & off even though in the heating or cooling mode and will enhance or minimize the quantity of heating or cooling with out switching by any means.
greater than at any time, shrinking product geometries, demanding new procedures and a hugely competitive setting require temperature control systems that Merge quick and correct temperature control by having an emphasis on lowered running fees and enhanced dependability.
Confirmed; TEs' symbolize just one A part of a chiller's design and style. The switching & Handle approaches employed by a chiller will impact read more the TEs' trustworthiness.
(consequently, setting up a static unit close to chamber won't empower it to deliver dynamic temperature Handle)
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